Ho etsa semiconductor ho hloka ho nepahala ho feteletseng, 'me kamore - pelo ea lisebelisoa tsa bohlokoa joalo ka li-reactor tsa CVD le mechini ea etching - e bapala karolo ea bohlokoa. Tataiso ena e hlahloba lintlha tsa bohlokoa tsa moralo oa kamore le hore na lisebelisoa tse phahameng tsa aluminium tse hloekileng li rarolla mathata a bohlokoa a indasteri joang.

Lintlha tse 5 tsa Bohlokoa Ts'ebetso ea Phaposi ea ho Khanna (Le Kamoo Aluminium e Fetang Kateng)

1. Ultra-High Vacuum (UHV) Compatibility & Thibelo ea ho Dutla

Bothata: Ho lutla ha Microscopic ho senya botšepehi ba tšebetso.

Molemo oa Aluminium:'Mele o sa tsitsang oa mochini oa CNCho tloha aluminium billets felisa lintlha tsa weld. Alloy ea rona ea 6061-T6 e fihlella <10⁻⁹ mbar·L/sec helium leak rates.

2. Tsamaiso ea Thermal: Botsitso Tlas'a Libaesekele tse Feteletseng

Bothata: Thermal warping e baka tšilafalo ea likaroloana.

Tharollo: Thermal conductivity e phahameng ea Aluminium (≈150 W/m·K) e feta tšepe e sa hloekang. Lipoleiti tsa rona tsa aluminium tse entsoeng ka mokhoa o ikhethileng li kopanya likanale tsa ho pholisa bakeng sa ± 0.5 ° C ho ts'oana.

3. Ho hanyetsa ho bola ha Plasma libakeng tse thata

Data Point: Anodized aluminium (25μm+ botenya) e mamella 10x nako e telele ho CF₄/O₂ ho pepeseha ha plasma khahlanong le libaka tse sa sebetsoeng.

4. Magnetic Permeability: RF / Plasma Process Botšepehi

Hobaneng Aluminium? Haufi le zero magnetic permeability e thibela ho khopama ha tšimo ho li-etchers/implanters.

5. Litšenyehelo khahlano le Ntlafatso ea Ts'ebetso

Mohlala: Ho nkela mochini o se nang litšilalikamore tse nang le aluminiume fokotsa litšenyehelo tsa thepa ka 40% le nako ea ho sebetsa ka 35% (e thehiloeng ho litekanyetso tsa indasteri ea 2024).

Litharollo tsa rona tsa Aluminium bakeng sa Likamore tse nepahetseng

Chamber Bodies & Lids

Boitsebiso: 5083/6061 Aluminium Plates (ho fihlela ho 150mm botenya)

Ts'ebetso: mochini oa CNC o lumellanang le vacuum ka Ra ≤ 0.8μm holimo holimo

Lintlha tsa bohlokoa: kalafo ea mocheso ea AMS 2772, tlhahlobo ea ultrasonic ea 100%.

Likarolo tsa Kabo ea Khase

Lihlahisoa: Li-tubes tsa aluminium tse nepahetseng (OD 3mm-200mm) tse nang le li-micro-bores tse ka hare

Theknoloji: Ho phunya lesoba le tebileng (L / D karo-karolelano ea 30: 1), electropolishing

Litšehetso tsa Sebopeho le Li-Fasteners

Boitsebiso: 7075-T651 Aluminium Rods (karolelano e phahameng ea matla-to-weight)

Ho lumellana: Litekanyetso tsa SEMI F72 bakeng sa taolo ea ho tsoa

Hobaneng o sebelisana le Rona bakeng sa Morero oa hau oa Semiconductor Chamber?

1. Mechine e Ikemetseng ea ho Hloekisa: Setsi sa Sehlopha sa 1000 se thibela tšilafalo ea likaroloana.

2. Material Traceability: Mill test report forpoleiti e 'ngoe le e' ngoe ea aluminium/rod/tube.

3. Plasma-Optimized Finishing: Proprietary passivation bakeng sa ho hanyetsa kutu.

4. Prototyping e potlakileng: Nako ea ho etella pele ea matsatsi a 15 bakeng sa li-geometri tse rarahaneng tsa kamore.