Kugadzira semiconductor kunoda kunyatsojeka, uye kamuri-moyo wemidziyo yakakosha seCVD reactor uye etching michina - inoita basa rakakosha. Gwaro iri rinoongorora zvakakosha dhizaini yekamuri uye kuti yakakwirira-kuchena aruminiyamu alloys kugadzirisa akakosha indasitiri matambudziko.

5 Zvinhu Zvinokosha Kutyaira Chamber Performance (Uye Mafambiro Akaita Aluminium Excels)

1. Kupindirana kweUltra-High Vacuum (UHV) & Kudzivirira Kudonha

Dambudziko: Microscopic inovuza inoparadza kutendeseka.

Aluminium Advantage:Seamless CNC-michina mivirikubva kualuminium billets kubvisa weld points. Yedu 6061-T6 alloy inobudirira <10⁻⁹ mbar·L/sec helium mazinga ekudonha.

2. Thermal Management: Kugadzikana Pasi Kunyanya Kufambisa Cycling

Dambudziko: Thermal warping inokonzeresa kusvibiswa kwechikamu.

Solution: Aluminium's superior thermal conductivity (≈150 W/m·K) inokunda simbi isina tsvina. Mahwendefa edu ealuminium akagadzirwa netsika anobatanidza nzira dzekutonhodza dze ± 0.5 ° C kufanana.

3. Plasma Corrosion Resistance in Harsh Environments

Data Point: Anodized aluminium (25μm + ukobvu) inomira 10x kureba CF₄/O₂ plasma exposure vs.

4. Magnetic Permeability: RF / Plasma Process Kutendeseka

Sei Aluminium? Pedyo-zero magineti permeability inodzivirira kukanganiswa kwemunda mune etchers/implanters.

5. Mutengo vs. Performance Optimization

Case Study: Kutsiva machined stainlessmakamuri ane aluminiuminoderedza mitengo yezvinhu ne40% uye machining nguva ne35% (zvichienderana ne2024 indasitiri mabhenji).

Yedu Aluminium Solutions yePrecision Chambers

Chamber Bodies & Lids

Material: 5083/6061 Aluminium Plates (kusvika 150mm gobvu)

Maitiro: Vacuum-inoenderana CNC machining neRa ≤ 0.8μm pamusoro pekupedzisira

Key Specs: AMS 2772 kupisa kurapwa, 100% ultrasonic bvunzo

Gasi Kugovera Zvikamu

Zvigadzirwa: Precision aluminium tubes (OD 3mm-200mm) nemukati micro-bores

Tech: Kuchera kwakadzika-gomba (L / D reshiyo 30: 1), electropolishing

Zvitsigiro zveStructural & Fasteners

Material: 7075-T651 Aluminium Rods (yakakwirira simba-kusvika-uremu reshiyo)

Kutevedzera: SEMI F72 zviyero zvekutonga kwekubuda kunze

Sei Uchishanda Nesu kune Yako Semiconductor Chamber Project?

1. Dedicated Cleanroom Machining: Kirasi 1000 nzvimbo inodzivirira kusvibiswa kwechikamu.

2. Material Traceability: Mill test report yeimwe neimwe aluminium ndiro/rod/tube.

3. Plasma-Optimized Finishing: Proprietary passivation for corrosion resistance.

4. Rapid Prototyping: 15-zuva rekutungamira nguva yekamuri yakaoma geometries.